方泰的多孔陶瓷通过陶瓷烧结技术具有许多孔隙，并用于真空卡盘。它可以作为气浮平台，广泛应用于半导体，面板，激光工艺和非接触式线性滑动。

陶瓷吸盘的应用原理：

通过施加正压和负压气体吸收或漂浮工件，工件包括晶圆，玻璃，PET薄膜或其他薄物体，将负真空压力的气流设定为进入陶瓷，工件可吸附，将正真空压力的气流设置为从陶瓷中流出，该部分可以吹起或不接触陶瓷。

Fangtai porous ceramic itself has many pores through ceramic sintering technology and is used for vacuum chuck. It can be used as an air floating platform and is widely used in semiconductor, panel, laser process and non-contact linear sliding.
Application principle:
By applying positive and negative pressure gas to absorb or float the workpiece, the workpiece includes wafer, glass, PET film or other thin objects, set the airflow of negative vacuum pressure to enter the ceramic, the workpiece can be adsorbed, set the airflow of positive vacuum pressure to To flow out of the ceramic, the part can be blown up or not in contact with the ceramic.